dc.description.abstract |
Abstract
The study examined the effect of phosphorus dopant concentration on mobility of
crystalline silicon (c-Si). The study considers different temperature and dopant concentration in
relation to its effect on the mobility of the crystalline silicon. The temperature and dopant
concentration ranges from
lOOK up to SOOK and 10
12
cm-
3
up to 10
20
cm-
3
,
respectively. The
thesis
work is based on simulation study by using existing software called "Mobility Calculator"
from a source called PV Light House. The mobility of the crystalline silicon as a function of
dopant concentration and temperature are studied in detail. The study indicates that the mobility
of phosphorus doped silicon, at different dopant concentration, tends to reduce as the
temperature is increased. On the other hand, the mobility
of the doped semiconductor, at
different temperature, showed different trend as the dopant concentration increases: I) mobility
decreased
in between 10
15
to 10
for doping concentrations less than10
16
cm-
3
,
II) mobility becomes constant as temperature increases
15
cm-
3
,
and 111) mobility not significantly affected, almost
linear, by increasing the temperature for high doping concentration
10
Furthermore, the total mobility is affected by both lattice and impurity scattering. The two issues,
lattice and impurity, dominate one another depending on the doping concentration and
temperature, and thus contributed to dependence
of mobility, on temperature, in different trend.
This seems to indicate
that the general trend, mobility verses temperature - and dopant
concentration, corresponds to the fundamental theory
of doping in semiconductors. The study
indicated the effect
of doping on the electrical parameters of the semiconductor quantit&tively.
Based on the study, as the temperature gets higher, the electron mobility will get lower, since
at
higher temperature more phonons can interact (collide) with carriers and the concentration of
impurity ions and thermally exited ions cancel out each and as result mobility becomes almost
constant, that is, the rate
of change of mobility is constant. For low doping concentrations, the
mobility is almost constant and is primarily limited by phonon scattering. However, for higher
doping concentrations the mobility
of carrier decreases due to the ionized impurity scattering
with the ionized doping atoms. The study has practical implication for tuning the electrical
property
of phosphorus doped crystalline silicon. |
en_US |